https://ogma.newcastle.edu.au/vital/access/ /manager/Index en-au 5 A micromachined nanopositioner with on-chip electrothermal actuation and sensing https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:10186 Wed 11 Apr 2018 11:01:47 AEST ]]> Ultrasonic energy transmission and conversion using a 2-D MEMS resonator https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:10184 Wed 11 Apr 2018 10:04:24 AEST ]]> A comparison of two excitation modes for MEMS electrothermal displacement sensors https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:18065 Sat 24 Mar 2018 08:06:14 AEDT ]]> Simultaneous capacitive and electrothermal position sensing in a micromachined nanopositioner https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:17967 Sat 24 Mar 2018 07:56:21 AEDT ]]> Design and characterization of a 2-DOF MEMS ultrasonic energy harvester with triangular electrostatic electrodes https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:25965 Sat 24 Mar 2018 07:37:03 AEDT ]]>